Deformation analysis of MEMS structures using modified digital moiré methods

Keyphrases

• Grating 100%
• System Structure 100%
• Micro-electro-mechanical Systems 100%
• Deformation Analysis 100%
• Microstructure Surface 33%
• Measurement Results 33%
• Phase Shift 33%
• Phase-type Distribution 33%
• Microsystems 33%
• Deformation Behavior 33%
• Micro-fabricated 33%
• Fringe Pattern 33%
• Measurement Principle 33%
• Experimental Protocol 33%
• Quantitatively Analysis 33%
• Processing Methods 33%
• Electromechanical System 33%
• Strain Measurement 33%
• Gaussian Blur 33%
• Functional Control 33%
• Digital Reference 33%
• Geometrical Phase Analysis 33%
• Design Control 33%

Engineering

• Micro-Electro-Mechanical System 100%
• Moir Fringe 100%
• System Structure 100%
• Gaussians 33%
• Microsystem 33%
• Deformation Behavior 33%
• Processing Method 33%
• Electromechanical System 33%
• Phase Analysis 33%

Physics

• Microelectromechanical System 100%
• Gaussian Distribution 33%
• Diffraction Pattern 33%
• Strain Measurement 33%