Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

Michael J Schöning, Niko Näther, Vincent Auger, Arshak Poghossian, Milena Koudelka-Hep

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.
Original languageEnglish
Pages (from-to)986-992
JournalSensors and Actuators, B: Chemical
Volume108
Issue number1-2
DOIs
Publication statusPublished - 22 Jul 2005

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Electrolytes
insulators
electrolytes
wafers
Semiconductor materials
sensors
Sensors
Capacitance
capacitance
cells
pH sensors
Penicillinase
Thermal evaporation
Spin coating
bioinstrumentation
Biosensors
coating
enzymes
Electron beams
Enzymes

Cite this

Schöning, Michael J ; Näther, Niko ; Auger, Vincent ; Poghossian, Arshak ; Koudelka-Hep, Milena. / Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies. In: Sensors and Actuators, B: Chemical. 2005 ; Vol. 108, No. 1-2. pp. 986-992.
@article{362bb08fedc444fd986043bd46c43b46,
title = "Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies",
abstract = "Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.",
author = "Sch{\"o}ning, {Michael J} and Niko N{\"a}ther and Vincent Auger and Arshak Poghossian and Milena Koudelka-Hep",
year = "2005",
month = "7",
day = "22",
doi = "10.1016/j.snb.2004.12.029",
language = "English",
volume = "108",
pages = "986--992",
journal = "Sensors and Actuators, B: Chemical",
issn = "0925-4005",
publisher = "Elsevier",
number = "1-2",

}

Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies. / Schöning, Michael J; Näther, Niko; Auger, Vincent; Poghossian, Arshak; Koudelka-Hep, Milena.

In: Sensors and Actuators, B: Chemical, Vol. 108, No. 1-2, 22.07.2005, p. 986-992.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies

AU - Schöning, Michael J

AU - Näther, Niko

AU - Auger, Vincent

AU - Poghossian, Arshak

AU - Koudelka-Hep, Milena

PY - 2005/7/22

Y1 - 2005/7/22

N2 - Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.

AB - Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 μm and volumes of 0.3-5 μl. The sensitive areas in the channels are ranging from 1.6 to 25 mm2. For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively.

U2 - 10.1016/j.snb.2004.12.029

DO - 10.1016/j.snb.2004.12.029

M3 - Article

VL - 108

SP - 986

EP - 992

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

SN - 0925-4005

IS - 1-2

ER -