Oversampling Successive Approximation Technique for MEMS Differential Capacitive Sensor

Longjie Zhong, Xinquan Lai, Donglai Xu

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Abstract

This paper proposed an over sampling successive approximation (OSSA) technique to build switched-capacitor capacitance-to-voltage convertor (SC-CVC) for readout circuit of MEMS differential capacitive sensor. The readout circuit employing the OSSA technique has significantly improved resistance to common-mode parasitic capacitance of the input terminal of the readout circuit. In the OSSA readout circuit, there are 5 main non-ideal characteristics: holding error, recovery degradation, increment degradation, rise-edge degradation and charge injection which reduce the accuracy and the settling time of the circuit. These problems are explained in detail and their solutions are given in the paper. The OSSA readout circuit is fabricated in a commercial 0.18um BCD process. To show the improvement evidently, a reported traditional readout circuit is also reproduced and fabricated using the same process. Compared with the traditional readout circuit, the proposed readout circuit reduces the affect of common-mode parasitic capacitance on the accuracy of SC-CVC by more than 23.8 dB, reduces power dissipation by 69.3%, and reduces die area by 50%.
Original languageEnglish
Pages (from-to)2240-2251
Number of pages12
JournalIEEE Journal of Solid-State Circuits
Volume53
Issue number8
Early online date8 May 2018
DOIs
Publication statusPublished - 1 Aug 2018

Fingerprint

Capacitive sensors
MEMS
Networks (circuits)
Capacitance
Sampling
Degradation
Capacitors
Charge injection
Electric potential
Energy dissipation

Bibliographical note

Author can archive post-print (ie final draft post-refereeing). For full details see http://www.sherpa.ac.uk/romeo/issn/0018-9200/ [Accessed: 27/07/2018]

Cite this

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title = "Oversampling Successive Approximation Technique for MEMS Differential Capacitive Sensor",
abstract = "This paper proposed an over sampling successive approximation (OSSA) technique to build switched-capacitor capacitance-to-voltage convertor (SC-CVC) for readout circuit of MEMS differential capacitive sensor. The readout circuit employing the OSSA technique has significantly improved resistance to common-mode parasitic capacitance of the input terminal of the readout circuit. In the OSSA readout circuit, there are 5 main non-ideal characteristics: holding error, recovery degradation, increment degradation, rise-edge degradation and charge injection which reduce the accuracy and the settling time of the circuit. These problems are explained in detail and their solutions are given in the paper. The OSSA readout circuit is fabricated in a commercial 0.18um BCD process. To show the improvement evidently, a reported traditional readout circuit is also reproduced and fabricated using the same process. Compared with the traditional readout circuit, the proposed readout circuit reduces the affect of common-mode parasitic capacitance on the accuracy of SC-CVC by more than 23.8 dB, reduces power dissipation by 69.3{\%}, and reduces die area by 50{\%}.",
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Oversampling Successive Approximation Technique for MEMS Differential Capacitive Sensor. / Zhong, Longjie; Lai, Xinquan; Xu, Donglai.

In: IEEE Journal of Solid-State Circuits, Vol. 53, No. 8, 01.08.2018, p. 2240-2251.

Research output: Contribution to journalArticleResearchpeer-review

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