Voltage Control Ratiometric Readout Technique With Improved Dynamic Range and Power-Efficiency for Open-Loop MEMS Capacitive Accelerometer

Longjie Zhong, Shubin Liu, Donglai Xu, Zhangming Zhu

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MEMS capacitive accelerometer for the Internet of Things (IoT) applications is designed with open-loop structure rather than closed-loop structure to achieve low power consumption. In the open-loop structure, voltage control readout technique is preferred for low cost. However, the voltage control readout technique suffers from low dynamic range and low power efficiency (in terms of FoM ). In this paper, the voltage control ratiometric (VCR) readout technique is proposed to improve both dynamic range and power efficiency. The VCR readout technique is demonstrated in a readout circuit fabricated in a commercial 0.18 μ m 1.8V/5.0V CMOS process. Compared to the traditional voltage readout circuit fabricated with the same CMOS process and tested with the same sensing element, the VCR readout circuit improves full input signal range by 3.5dB (from ± 8g to ± 12g ) and the noise floor by 9.5dB (from 804 μ g Hz to 270 μ g Hz ). As a result, the dynamic range is improved by 13.0dB (from 44.0dB to 57.0dB ), the Fo M 1 is improved from 310pJ to 83pJ and the Fo M2 is improved from 1977 μ W μ g/Hz to 796 μ W μ g/Hz.

Original languageEnglish
Pages (from-to)5085-5095
Number of pages11
JournalIEEE Transactions on Circuits and Systems I: Regular Papers
Issue number12
Early online date5 Sept 2022
Publication statusPublished - 1 Dec 2022

Bibliographical note

Funding Information:
This work was supported by the National Natural Science Foundation of China (NSFC) under Grant 62021004, Grant 62004035, Grant 62022065, Grant 62090043, and Grant U19A205.

Publisher Copyright:
© 2004-2012 IEEE.

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